Introduction to principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). In-depth analysis of sensors, actuator principles, and integrated microfabrication techniques for MEMS. Comprehensive investigation of state-of-the-art MEMS devices and systems. Same as IE 485 and ECE 485. Prerequisite: Senior standing in the College of Engineering. 3 undergraduate hours.
1. Introduction and motivation
2. Electrostatic sensing and actuation principles
3. Thermal sensing and actuation principles
4. Piezoresistive sensing principles
5. Piezoelectric sensing and actuation principles
6. Magnetic sensing and actuation principles
7. Bulk and surface micromachining techniques
8. Microfabrication of semiconductor and in-organic materials
9. Case studies
ME: MechSE or technical elective.
EM: Possible secondary field, with approval.