ME 487: MEMS-NEMS Theory & Fabrication

Class Description:

Physical and chemical theory, design and hands-on fabrication of micro-and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.

Prerequisite - Physics 212 4 Undergraduate hours or 4 Graduate Hours

TOPICS:

1. Safety

2. Lithography

3. Additive processes

4. Subtractive processes

5. Bulk micromachining

6. Surface micromachining

7. DRIE and LIGA

8. Packaging

9. Scaling

10. Actuators

11. Microfluidics

12. In-class exams

LABORATORY TOPICS

1. Photolithography

2. Metal deposition

3. Dry and wet etching

4. Pressure Sensors

5. Microfluidics

6. Device testing

7. Project reports
 

ME: MechSE or technical elective.

EM: Possible secondary field, with approval.

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ME

TAM