MS in Mechanical Engineering with a Certificate in Micro and Nano Systems Engineering

The Department of Mechanical Science and Engineering offers a unique professional-style MS degree for students interested in earning a certification in Micro Nano Systems Engineering. The certificate MS program is a non-thesis program, with an accelerated 12-month schedule highlighted by a summer capstone research project. Prior to the research program, students complete two semesters of focused, nanotechnology-related courses. Students in this accelerated, professional program are not support by assistantships or fellowships. Information on the MS degree with a certificate in Micro Nano Systems Engineering is given below.

Semester 1 (fall)

ME 498 (Section NST) Introduction to Nano Science and Technology
ECE/ME 485 Introduction to Micro Electromechanical Devices and Systems
ME 598 (Section CNT) Computational Nanotechnology
ME 487 MEMS-NEMS Theory and Fabrication
ME 590 Research Seminar

Semester 2 (spring)

ME 598 (Section NTF) Nanoscale Transport Fundamentals
ME 586 Mechanics of MEMS and NEMS
ME 598 (Section TPX) Theory and Practice of Nanofabrication and Characterization
Elective (An approved 4 credit hour 400 or 500-level engineering course)

Semester 3 (summer)

Capstone project


Contact Info

Graduate Programs Office
166 MEB
1206 W. Green St.
Urbana, IL 61801
(217) 244-3416
mechse-gradatillinois [dot] edu

Student Profiles

Best research institute in my research area.

MechSE Grad at-a-glance