MS in Mechanical Engineering with a Certificate in Micro and Nano Systems Engineering

The Department of Mechanical Science and Engineering offers a unique professional-style MS degree for students interested in earning a certification in Micro Nano Systems Engineering. The certificate MS program is a non-thesis program, with an accelerated 12-month schedule highlighted by a summer capstone research project. Prior to the research program, students complete two semesters of focused, nanotechnology-related courses. Students in this accelerated, professional program are not support by assistantships or fellowships. Information on the MS degree with a certificate in Micro Nano Systems Engineering is given below.

Semester 1 (fall)

ME 498 (Section NST) Introduction to Nano Science and Technology
ECE/ME 485 Introduction to Micro Electromechanical Devices and Systems
ME 598 (Section CNT) Computational Nanotechnology
ME 487 MEMS-NEMS Theory and Fabrication
ME 590 Research Seminar

Semester 2 (spring)

ME 598 (Section NTF) Nanoscale Transport Fundamentals
ME 586 Mechanics of MEMS and NEMS
ME 598 (Section TPX) Theory and Practice of Nanofabrication and Characterization
Elective (An approved 4 credit hour 400 or 500-level engineering course)

Semester 3 (summer)

Capstone project


Contact Info

Graduate Programs Office
166 MEB
1206 W. Green St.
Urbana, IL 61801
(217) 244-3416
mechse-gradatillinois [dot] edu

Student Profiles

I chose Illinois because of the excellent faculty, large amount of resources, and the ability to immediately begin important research projects. Particularly the resources for supporting students, funding research, and...

MechSE Grad at-a-glance